Temporally and Spatially Resolved Plasma Spectroscopy in Pulsed Laser Deposition of Ultra-Thin Boron Nitride Films

Afrl-rx-wp-ja-2016-0196 Temporally and Spatially Resolved Plasma Spectroscopy in Pulsed Laser Deposition of Ultra-thin Boron Nitride Films (postprint)

Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation as interlayer between WC–Co hard metals and CVD diamond films

Thin films of boron nitride have been obtained by reactive pulsed laser ablation of a boron target in the presence of a 13.56 MHz radio frequency nitrogen plasma. The films have been deposited at several substrate temperatures, using the on-axis configuration, on WC–Co cutting tools, after Co removal by chemical etching (HClyHNO or HFyHNO ). Diamond polycrystalline 3 3 films of increasing thick...

Mechanism for Low Temperature Growth of Boron Nitride Nanotubes

Selective growth of boron nitride nanotubes (BNNTs) was demonstrated by plasma-enhanced pulsed laser deposition (PE-PLD). Although PLD is a physical vapor deposition technique for the growth of boron nitride (BN) thin films, ion sputtering induced by the plasma can eliminate the formation of BN thin films and lead to the so-called total resputtering region, in which, a pure phase of BNNTs can b...

Synthesis of Boron-Aluminum Nitride Thin Film by Chemical Vapour Deposition Using Gas Bubbler

Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...

X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films’ spectra to those of several single-phase BN powder standards shows that the films consist primarily of sp bonds. Other features in the films’ spectra suggest the presence of secondary phases, possibly cub...